Substrate holder

The RBS is a 13.56 MHz capacitivly coupled plasma source with rf self bias. The standard version is water cooled, resistively heated versions ( T< 1000° C) are available upon request. Learn more about applications using the RBS in our Tech Library

Please click on the picture for more information or call our specialist:

Dr. Axel Schwabedissen: +49 202 -28397-121

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